Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters
Reexamination Certificate
2010-06-01
2011-11-01
Nguyen, Vincent Q (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Distributive type parameters
C073S514010
Reexamination Certificate
active
08049515
ABSTRACT:
The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.
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German Office Action, Application No. 10 2009 021 957.9-54, dated Feb. 22, 2011, 7 pages.
Loehndorf Markus
Schoen Florian
Infineon - Technologies AG
Nguyen Vincent Q
Patterson Thuente Christensen Pedersen , P.A.
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