Silicon MEMS resonator devices and methods

Details Silicon MEMS resonator devices and methods Silicon MEMS resonator devices and methods

2008-08-19

2011-11-01

Patel, Paresh (Department: 2858)

Electricity: measuring and testing

Magnetic

Displacement

Reexamination Certificate

active

08049490

ABSTRACT:
Embodiments of the invention are related to MEMS devices and methods. In one embodiment, a MEMS device includes a resonator element comprising a magnetic portion having a fixed magnetization, and at least one sensor element comprising a magnetoresistive portion, wherein a magnetization and a resistivity of the magnetoresistive portion vary according to a proximity of the magnetic portion.

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