Silicon membrane micro-scale

Details Silicon membrane micro-scale Silicon membrane micro-scale

1988-06-03

1990-10-02

Miller, Jr., George H.

Weighing scales

Self-positioning

Electrical current generating or modifying

73718, G01G 314, G01L 912

Patent

active

049601776

ABSTRACT:
This invention relates to force responsive transducers and more particularly concerns a micromachined, solid state micro-scale. The device consists of a central silicon platorm surrounded and supported by a thin silicon membrane. The silicon substrate is placed over an aluminum pad recessed into a well on a supporting glass substrate. The micro-scale responds to a static method of measuring force, similar to a spring scale. A gravitational acceleration vector acting on a mass placed onto the device produces a force known as weight. The weight mechanically displaces the silicon platform and membrane which is transduced to an electrical signal where a change in capacitance is measured. Geometry of the silicon platform, membrane and glass well depth may be used to affect the linearity, sensitivity and range of measurement of the micro-scale.

REFERENCES:
patent: 4266263 (1981-05-01), Haberl et al.
patent: 4512431 (1985-04-01), Bloomfield
patent: 4589054 (1986-05-01), Kuisma
patent: 4594639 (1986-06-01), Kuisma
patent: 4738324 (1988-04-01), Borchard
patent: 4825967 (1989-05-01), Sakamoto et al.

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