Silicon melting and evaporation apparatus for high purity applic

Details Silicon melting and evaporation apparatus for high purity applic Silicon melting and evaporation apparatus for high purity applic

1985-03-29

1986-02-11

Pianalto, Bernard D.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118 501, 156619, 219383, 373 62, 373120, C23C 1308

Patent

active

045693072

ABSTRACT:
An apparatus for producing high purity silicon melts utilizes a solid silicon body which is drilled to provide bores into which electrodes are inserted. The electrodes preferably are also of silicon and an electric arc-current is passed through the electrodes to generate an arc which melts out the body to define a cavity therein containing the melt. The melt may be used for the drawing of a silicon bar or for the deposition of silicon in vapor form from the melt upon a substrate in a vacuum chamber.

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