Optical waveguides – Temporal optical modulation within an optical waveguide
Reexamination Certificate
2007-02-13
2007-02-13
Pak, Sung (Department: 2874)
Optical waveguides
Temporal optical modulation within an optical waveguide
C385S129000, C438S719000
Reexamination Certificate
active
10915299
ABSTRACT:
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. The silicon layers have high free carrier mobility. In one aspect of the invention a high mobility silicon layer can be provided by crystallizing an amorphous silicon layer. In another aspect of the invention, a high mobility silicon layer can be provided by using selective epitaxial growth and extended lateral overgrowth thereof.
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Keyser Thomas
Larsen Bradley J.
Yue Cheisan J.
Honeywell International , Inc.
McDonnel Boehnen Hulbert & Berghoff LLP
Pak Sung
Wong Tina M.
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