Radiant energy – Infrared-to-visible imaging – Including detector array
Patent
1976-11-01
1977-12-06
Borchelt, Archie R.
Radiant energy
Infrared-to-visible imaging
Including detector array
250370, 357 24, H01J 3149
Patent
active
040619168
ABSTRACT:
A layer of epitaxial silicon is grown on a silicon growth substrate, a thin ayer of silicon dioxide or other suitable insulator is grown (in the case of silicon dioxide) or deposited (for other insulators) on the epitaxial layer, and a thick layer of polysilicon is grown on the dioxide layer. The silicon growth substrate is then removed, and the epitaxial layer is etched to form islands on the insulator layer. Some of the islands are doped to form an array of infrared sensitive detectors, and a large island is doped to act as CCD region. Electrical leads are fabricated, some to provide drive and output lines for the CCDs, other to provide connections of the detectors to respective CCDs, and yet others to provide common leads for the detectors.
REFERENCES:
patent: 3806729 (1974-04-01), Caywood
patent: 3842274 (1974-10-01), Greene et al.
patent: 3883437 (1975-05-01), Nummedal et al.
patent: 3996599 (1976-12-01), King
King Gerard J.
Martino, Jr. Joseph F.
Borchelt Archie R.
Dunn Aubrey J.
Edelberg Nathan
Gibson Robert P.
The United States of America as represented by the Secretary of
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