Measuring and testing – Dynamometers – Responsive to force
Patent
1997-10-03
1999-06-22
Chilcot, Richard
Measuring and testing
Dynamometers
Responsive to force
G01L 102
Patent
active
059152818
ABSTRACT:
A silicon sensing cell (12) capable of sensing force and/or displacement, and particular embodiments of the sensing cell (12) for particular force and/or displacement-sensing applications. The sensing cell (12) generally includes a diaphragm (18), a silicon sensing element (28) operatively associated with the diaphragm (18) to sense strain or deflection of the diaphragm (18), a base (14) supporting the diaphragm (18) so that the base (14) and the diaphragm (18) define a recess (22), and a force-distributing member (20) within the recess (22) and contacting the diaphragm (18). The diaphragm (18) is preferably single-crystal silicon, and the sensing element (28) can be a piezoresistive, piezoelectric or capacitive element preferably formed in the diaphragm (18) using semiconductor fabrication processes. With appropriate adaptations, the sensing cell (12) can be made suitable for automotive applications such as seat occupancy sensing, brake-by-wire and acceleration-by-wire pedal systems, and media-compatible high-pressure sensing in brake, oil and transmission fluid applications.
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Chilcot Richard
Delco Electronics Corporation
Funke Jimmy L.
Thompson Jewel V.
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