Measuring and testing – Volume or rate of flow – By measuring thrust or drag forces
Patent
1995-08-07
1997-09-02
Dombroske, George M.
Measuring and testing
Volume or rate of flow
By measuring thrust or drag forces
7386174, G01F 128
Patent
active
056635087
ABSTRACT:
A silicon flow sensor is provided having an uncomplicated design and construction, while also exhibiting a desirable level of sensitivity for use in automotive applications. The primary sensing component is preferably formed by a single silicon chip on which associated signal conditioning and compensating circuitry can be provided. The chip includes a base region from which a vane is cantilevered so as to be adapted to deflect in either of two directions when impinged by fluid flow. A beam region is present intermediate the vane and the base region on which a strain sensing element is present, such that strain occurring in the beam region as a result of vane deflection is sensed to indicate the degree to which the vane is deflected. The construction of the flow sensor is such that its sensitivity can be readily modified during its manufacture in order to optimize the sensor for its intended use.
REFERENCES:
patent: 3298230 (1967-01-01), Stover
patent: 3340733 (1967-09-01), Lasher
patent: 3722264 (1973-03-01), Talmo et al.
patent: 4625565 (1986-12-01), Wada et al.
patent: 4670092 (1987-06-01), Motamedi
patent: 5131265 (1992-07-01), Tobin et al.
patent: 5279162 (1994-01-01), Takebe et al.
patent: 5319980 (1994-06-01), Kremidas
Flow Its Measurement and Control in Science and Industry --Volume Two 1981 St. Louis William W. Durgin Editor-in-Chief, Article E-706 entitled "Miniature Drag-Force Anemometer" by L. N. Krause and G. C. Fralick pp. 117-130.
Delco Electronics Corporation
Dombroske George M.
Funke Jimmy L.
Patel Harshad
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