Silicon fiber optic sensors

Details Silicon fiber optic sensors Silicon fiber optic sensors

2007-10-02

2007-10-02

Doan, Jennifer (Department: 2874)

Optical waveguides

Optical waveguide sensor

C385S094000, C385S128000

Reexamination Certificate

active

11132663

ABSTRACT:
A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.

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