Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1982-06-11
1984-01-10
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Diaphragm
361283, G01L 912
Patent
active
044247133
ABSTRACT:
A capacitive pressure transducer utilizing a plate of electrically conductive semi-conductor material sandwiched between a pair of plates of inorganic electrically insulating material and electrostatically bonded thereto. A pair of concentric circular recesses are etched in the plates in such a way as to form cavities on opposing sides of the conductive plate and to define a diaphragm area on that plate. Apertures are drilled through the insulating plates to expose the cavities to the pressures to be measured. The surfaces of the insulating plates in the cavities have deposited on them electrically conductive surfaces which form capacitors with the diaphragm area on the conductive plate. A stress relief area is provided on the high pressure side surrounding the diaphragm area. In that stress relief area, the conductive plate is unrestrained by the adjacent insulating plate. Provision of this stress relief makes it possible to extend the pressure range of the transducer beyond the range which would normally be useful for the dimensions of the particular transducer.
REFERENCES:
patent: 4158311 (1979-06-01), Yasuhara et al.
patent: 4199991 (1980-04-01), Kodama
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4390925 (1983-06-01), Freud
Freud Paul J.
Kroninger, Jr. Paul M.
Updike Dean P.
General Signal Corporation
Huberfeld Harold
Miller, Jr. William G.
Woodiel Donald O.
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