Silicon-containing polymer, process for its production,...

Details Silicon-containing polymer, process for its production,... Silicon-containing polymer, process for its production,...

2006-12-05

2006-12-05

Peng, Kuo-Liang (Department: 1712)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

C556S458000, C556S460000, C528S023000, C528S012000, C528S041000, C430S325000, C524S588000, C427S387000

Reexamination Certificate

active

07144968

ABSTRACT:
A silicon-containing polymer having a tetrafunctional siloxane portion as the basic skeleton, and containing a carboxylic acid group-containing triorganosiloxane portion and a carboxylic acid derivative group-containing triorganosiloxane portion in a specific proportion. It may be advantageously used as a negative non-chemical amplification resist polymer or a positive chemical amplification resist polymer.

REFERENCES:
patent: 2721856 (1955-10-01), Sommer
patent: 2833802 (1958-05-01), Merker et al.
patent: 3471435 (1969-10-01), Miller
patent: 4418165 (1983-11-01), Polmanteer et al.
patent: 4725658 (1988-02-01), Thayer et al.
patent: 5708098 (1998-01-01), Cook et al.
patent: 58-96654 (1983-06-01), None
patent: 61-108628 (1986-05-01), None
patent: 62-104032 (1987-05-01), None
patent: 62-220949 (1987-09-01), None
patent: 1-56732 (1989-03-01), None
patent: 1-22224 (1989-09-01), None
patent: 3-29311 (1991-02-01), None
patent: 5-58446 (1993-03-01), None
patent: 5-181280 (1993-07-01), None
patent: 6-95385 (1994-04-01), None
patent: 6-184311 (1994-07-01), None
patent: 6-202338 (1994-07-01), None
patent: 08-325276 (1996-10-01), None
patent: 11-130860 (1999-05-01), None
Chemical Abstract 1950, 46:10681g.
Hochmolekularbericht 1971, H. 1408/71.
Hockmolekularbericht 1981, H. 12827/81.
Derment CPI, 1987, Ref. 87-95374/14.
Chemical Abstract 1950, 46:10681g.
Hochmolekularbericht 1971, H. 1408/71.
Hochmolekularbericht 1981, H.12821/81.
Derment CPI, 1987, Ref. 87-95374/14.

Affiliated with

Also associated with

Rating

Silicon-containing polymer, process for its production,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silicon-containing polymer, process for its production,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silicon-containing polymer, process for its production,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3718446