Silicon-containing coatings and a method for their preparation

Details Silicon-containing coatings and a method for their preparation Silicon-containing coatings and a method for their preparation

1986-02-28

1987-09-29

Smith, John D.

Fishing, trapping, and vermin destroying

427249, 4272552, B05D 512

Patent

active

046968342

ABSTRACT:
The invention relates to the formation of silicon-containing coatings from the vapor phase thermal decomposition of halosilanes, polyhalodisilanes, polyhalosilanes or mixtures thereof in the presence of a metal catalyst. The instant invention also relates to the formation of silicon- and carbon-containing coatings and silicon- and titanium-containing coatings from the vapor phase thermal decomposition of alkyl halides and titanium halides, respectively, in the presence of a halosilane, polyhalosilane or halodisilane, and a metal catalyst.

REFERENCES:
patent: 2606811 (1952-08-01), Wagner
patent: 4064521 (1977-12-01), Carlson
patent: 4079071 (1978-03-01), Neale
patent: 4374182 (1983-02-01), Gaul
patent: 4459163 (1984-07-01), MacDiarmid
patent: 4525334 (1985-06-01), Woditsch
Easton et al, "The Plasma-Enhanced Deposition of Hydrogenated Amorphous Silicon", Vacuum, vol. 34, No's. 3-4, Mar.-Apr. 1984, pp. 371-376.
Harold Shafer, "Chemical Transport Reactions", 1984, p. 46.
Harold Shafer, Z. Znorg. Chem., 445, pp. 129-139, (1978).

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