Silicon compound and a production process for silicon compound

Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing

Reexamination Certificate

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Reexamination Certificate

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07129370

ABSTRACT:
The object of the present invention is to provide a new kind of silicon compound having an ester-type organic functional group and a new method for providing a T8-silsesquioxane compound having a hydroxyl group by using said silicon compound as the starting material.A silicon compound represented by formula (1) is obtained through the production process characterized by using a silicon compound represented by formula (2).wherein:in formula (1), each of seven R1group is independently selected from the group consisting of hydrogen, alkyl, substituted or unsubstituted aryl, and substituted or unsubstituted arylalkyl and A2is a hydroxyl-terminal organic functional group, and in formula (2), each of R1group is the same as R1in formula (1), and A1is an organic functional group containing an acyloxy group.

REFERENCES:
“Orhani/Inorganic nanocomposite star poolymer via atom transfer Radical Polymerization of Methyl methacrylate Using octafunctional silsesquioxane cores”, Macromolecules 2001, 34, p. 5398-5407.
Fluoropolymerr Resists for 157 nm Lithography, Advance in Resist Technology and Processing XX, Jun. 2003.

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