Optical waveguides – Temporal optical modulation within an optical waveguide
Reexamination Certificate
2011-05-24
2011-05-24
Lepisto, Ryan (Department: 2883)
Optical waveguides
Temporal optical modulation within an optical waveguide
C385S002000, C385S008000, C385S009000, C385S131000
Reexamination Certificate
active
07949210
ABSTRACT:
This invention provides fundamental science and novel device architectures for surface plasmon (SP)-based, complementary metal oxide semiconductor (CMOS)-compatible, optical elements such as modulators, couplers, and switches. The primary focus of the work is on waveguides based on an ultra-long-range surface plasmon (ULRSP) waveguide mode recently discovered by our team. This mode exists at the metal-dielectric interfaces in a silicon-oxide-metal-silicon layer structure. While initial work focuses on noble metals to support the ULRSP, our analysis shows Si processing-compatible metals such as Cu and Al can also be used. Our modeling has also shown that variation in the thickness of the oxide layer can be used to give unprecedented propagation lengths in such structures. Electrically-induced free carrier modulation of the dielectric constant in the Si adjacent to the oxide can modulate the waveguide properties allowing novel Si-compatible electro-optic devices to be created. These waveguides function as the “wiring” in new classes of optical chips. This invention also provides integration of ULRSP waveguides and switches with other optical elements to create entirely new classes of hybrid optoelectronic technologies for defense applications. These range from chip-based chemical agent detection to extremely high performance processors and even all-optical computations.
REFERENCES:
patent: 5055265 (1991-10-01), Finlan
patent: 5067788 (1991-11-01), Jannson et al.
patent: 5337183 (1994-08-01), Rosenblatt
patent: 5478755 (1995-12-01), Attridge et al.
patent: 5606633 (1997-02-01), Groger et al.
patent: 5776785 (1998-07-01), Lin et al.
patent: 5830766 (1998-11-01), Attridge et al.
patent: 5846843 (1998-12-01), Simon
patent: 6034809 (2000-03-01), Anemogiannis
patent: 6178275 (2001-01-01), Nerses et al.
patent: 6330387 (2001-12-01), Salamon et al.
patent: 6421128 (2002-07-01), Salamon et al.
patent: 6731388 (2004-05-01), Simon et al.
patent: 7583882 (2009-09-01), Guo
patent: 2005/0249451 (2005-11-01), Baehr-Jones et al.
patent: 2006/0066249 (2006-03-01), Wark et al.
“Observation of the two-dimensional Plasmon in silicon inversion layers,” by Allen et al, Physical Review Letters, vol. 38, No. 17, Apr. 1977, pp. 980-983.
“Surface Plasmon polariton based modulators and switches operating at telecom wavelengths,” by Nikolajsen et al, Applied Physics Letters, vol. 85, No. 24, Dec. 2004, pp. 5833-5835.
“Characterization of long-range surface-plasmon-polariton waveguides,” by Berini et al, Journal of Applied Physics, vol. 98, pp. 043109-1 through 043109-12, 2005.
Agarwal et al. (Dec. 1, 1996) “Low-Loss Polycrystalline Silicon Waveguides for Silicon Photonics,”J. Appl. Phys. 80(11):6120-6123.
Akbar et al. (Feb. 20, 2006) “Optimization of Precursor Pulse Time in Improving Bulk Trapping Characteristics of Atomic-Layer-Deposition HfO2Gate Oxides,”Apple. Phys. Lett. 88(8):082901.
Barrios et al. (Apr. 2003) “Low-Power-Consumption Short-Length and High-Modulation-Depth Silicon Electrooptic Modulator,”J. Lightwave Technol. 21:1089-1098.
Barnes et al. (Aug. 14, 2003) “Surface Plasmon Subwavelength Optics,”Nature424:824-830.
Berini et al. (2005) “Characterization of Ling-Range Surface-Plasmon-Polariton Waveguides,”J. Appl. Phys. 98:43109.
Burstein et al. (1974) “Surface Polaritons-Propagating Electromagnetic Model at Interfaces,”J. Vac. Sci. Technol. 11:1004-1019.
Byahut et al. (Jan. 1990) “A Device for Performing Surface-Plasmon-Polariton-Assisted Ramen-Scattering from Adsorbates on Single-Crystal Silver Surfaces,”Rev. Sci. Instrum. 61(1):27-32.
Charbonneau et al. (Jun. 1, 2000) “Experimental Observation of Plasmon-Polariton Waves Supported by a Thin Metal Film of Finite Width,”Opt. Lett. 25(11):844-846.
Chilwell et al. (Jul. 1984) “Thin Film Transfer Matrix Theory of Planar Multilayer Waveguides and Reflection from Prism-Loaded Waveguides,”JOSA A1(7):742-753.
Cocorullo et al. (2000) “Fast Infrared Light Modulation in a Si:H Micro-Devices for Fiber-to-the-Home Applications,”J. Non-Cryst. Solids:1247-1251.
Cocorullo et al. (Dec. 15, 1996) “Amorphous Silicon Waveguides and Light Modulators for Integrated Photonics Realized by Low-Temperature Plasma-Enhanced Chemical-Vapor Deposition,”Opt. Lett. 21(24):2002-2004.
Cutolo et al. (Jul. 14, 1997) “An Electrically Controlled Bragg Reflector Integrated in a Rib Silicon on Insulator Waveguide,”Appl. Phys. Lett. 71(2):199-201.
de Dood et al. (Jul. 15, 2002) “Amorphous Silicon Waveguides for Microphotonics,”J. Appl. Phys. 92(2):649-653.
Devaux et al. (Dec. 15, 2003) “Launching and Decouplling Surface Plasmons Via Micro-Gratings,”Appl. Phys. Lett. 83(24):4936-4938.
Ditlbacher et al. (2002) “Two-Dimensional Optics with Surface Plasmon Polaritons,”Appl. Phys. Lett. 81(10):1762-1764.
Harke et al. (Dec. 8, 2005) “Low-Loss Singlemode Amorphous Silicon Waveguides,”Electron. Lett. 41(25):1377-1379.
Homola et al. (1999) “Surface Plasmon Resonance Sensors,”Sens. Actuators B54:3-15.
Lamprecht et al. (Jul. 2, 2001) “Surface Plasmon Propagation in Microscale Metal Stripes,”Appl. Phys. Lett. 79(1):51-53.
Liao et al. (Apr. 18, 2005) “High Speed Silicon Mach-Zehnder Modulator,”Optics Expr. 13(8):3129-3135.
Liu et al. (Feb. 12, 2004) “A High-Speed Silicon Optical Modulator Based on a Metal-Oxide-Semiconductor Capacitor,”Nature427:615-618.
Maier et al. (2001) “Electromagnetic Energy Transport Below the Diffraction Limit in Periodic Metal Nanostructures,”Proc. SPIE4456:22-30.
Maier, S.A. (2005) “Plasmonics—Towards Subwavelength Optical Devices,”Curr. Nanosci. 1(1):17-23.
Nabok et al. (2005) “Total Internal Reflection Ellipsometry and SPR Detection of Low Molecular Weight Environmental Toxins,”Appl. Surf. Sci. 246:381-386.
Nikolajsen et al. (Dec. 13, 2004) “Surface Plasmon Polariton Based Modulators ad Switches Operating at Telecom Wavelengths,”Appl. Phys. Lett. 85(24):5833-5835.
Nikolajsen et al. (Feb. 3, 2003) “Polymer-Based Surface-Plasmon-Polariton Stripe Waveguides at Telecommunication Wavelengths,”Appl. Phys. Lett. 8(5)2:668-670.
Nikolov et al. (May 1, 2000) “Optical Plastic Refractive Measurements in the Visible and the Near-Infrared Regions,”App. Opt. 39(13):2067-2070.
Ozbay, E. (Jan. 13, 2006) “Plasmonics: Merging Photonics and Electronics at Nanoscale Dimensions,”Science311:189-193.
Ritchie, R.H. (1973) “Surface Plasmons in Solids,”Surf. Sci. 34:1-19.
Salib et al. (2004) “Silicon Photonics,”Intel Technol. J. 8:143-160.
Sarid, D. (Dec. 28, 1981) “Long-Range Surface-Plasma Waves on Very Thin Metal Films,”Phys. Rev. Lett. 47(26):1927-1930.
Sciuto et al. (2005) “Miniaturizable Si-Based Electro-Optical Modulator Working at 1.5 μm,”Appl. Phys. Lett. 86(20):201115.
Smolyaninov et al. (Jul. 15, 1997) “Experimental Study of Surface-Plasmon Scattering by Individual Surface Defects,”Phys. Rev. B56(3):1601-16111.
Soref, R. (2005) “Silicon Photonics Technology: Past Present and Future,”Proc. SPIE5730:19-28.
Soref et al. (Jan. 1987) “Electrooptical Effects in Silicon ,”IEEE J. Quantum ElectronQE-23:123-129.
Soref et al. (1987) “Kramers-Kronig Analysis of Electro-Optical Switching in Silicon,”Proc. SPIE—It. Soc. Opt. Eng. 704:32-37.
Stegeman, G. (Sep. 1983) “Effects of Gaps on Long range Surface Plasmon Polaritons,”J. Appl. Phys. 54(9):4841-4843.
Wark et al. (Jul. 1, 2005) “Long-Range Surface Plasmon Resonance Imaging for Bioaffinity Sensors,”Anal. Chem. 77(13):3904-3907.
Weeber et al. (2001) “Near-Fields Observation of Surface Plasmon Polariton Propagation on thin Metal Stripes,”Phys. Rev.
Collins Reuben T.
Durfee Charles G.
Furtak Thomas E.
Colorado School of Mines
Greenlee Sullivan P.C.
Lepisto Ryan
Tavlykaev Robert
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