Silicon carbide with high thermal conductivity

Details Silicon carbide with high thermal conductivity Silicon carbide with high thermal conductivity

2004-08-02

2008-10-21

Johnson, Edward M (Department: 1793)

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

C423S346000

Reexamination Certificate

active

07438884

ABSTRACT:
A chemical vapor deposited, β phase polycrystalline silicon carbide having a high thermal conductivity and reduced stacking faults. The silicon carbide is synthesized under specific conditions using hydrogen gas and methyltrichlorosilane gas as reactants. The thermal conductivity of the silicon carbide is sufficiently high such that it can be employed as parts of apparatus and components of electrical devices where a high heat load is generated. Such components may include active thermoelectric coolers, heat sinks and fans.

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