Silicon carbide member

Details Silicon carbide member Silicon carbide member

1990-11-05

1993-07-20

Robinson, Ellis P.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428216, 428469, 428472, 428698, B32B 702

Patent

active

052291936

ABSTRACT:
A silicon carbide member is manufactured by depositing a silicon carbide coating on a substrate of silicon carbide containing free silicon by chemical vapor deposition. By gradually reducing the content of free silicon of the coating such that the coating is made of silicon carbide containing free silicon at the interface with the substrate, but of silicon carbide containing no free silicon at the outer surface, the coating is firmly bonded to the substrate, undergoes little thermal stress and is resistant against cracking and separation upon thermal cycling. The member is suitable for use in the heat treatment of semiconductor elements.

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