Silicon carbide diffusion furnace components with an impervious

Details Silicon carbide diffusion furnace components with an impervious Silicon carbide diffusion furnace components with an impervious

1987-03-30

1988-08-02

Favors, Edward G.

Heating

Accessory means for holding, shielding or supporting work...

432258, 432259, F27D 500

Patent

active

047611340

ABSTRACT:
A diffusion furnace component system is disclosed which includes a liner, process tube, paddle and boat. These various elements are made up of a matrix of sintered silicon carbide which has been infiltrated with 5 to 30% by weight of silicon metal and finally coated with an impervious film or layer of a high purity refractory material such as e.g. silicon carbide.

REFERENCES:
patent: 3157541 (1964-11-01), Heywang et al.
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4516897 (1985-05-01), Shider et al.
patent: 4613305 (1986-09-01), Sakurai
patent: 4687185 (1987-08-01), Urano et al.

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