Silicon carbide diffusion furnace components

Details Silicon carbide diffusion furnace components Silicon carbide diffusion furnace components

1974-12-06

1976-04-20

Camby, John J.

Heating

Accessory means for holding, shielding or supporting work...

432258, 432259, F27B 506

Patent

active

039515877

ABSTRACT:
Process tube, paddle, and boat for a semi-conductor diffusion furnace composed of a matrix of high purity sintered silicon carbide which is made impervious to gases by impregnation thereof with silicon metal which is 99.9% pure. The process tube, paddle and boat provide the ultra pure environment needed for semi-conductor production and are highly resistant to the degradative effect of a great number of high temperature heating cycles.

REFERENCES:
patent: 2784112 (1957-03-01), Nicholson
patent: 3183130 (1965-05-01), Reynolds et al.
patent: 3765300 (1973-10-01), Taylor
patent: 3811829 (1974-05-01), Wesson
patent: 3859399 (1975-01-01), Bailey

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