Optical waveguides – Planar optical waveguide
Patent
1997-09-22
1999-11-23
Bovernick, Rodney
Optical waveguides
Planar optical waveguide
385130, 757186, 757431, G02B 610
Patent
active
059914874
ABSTRACT:
An optical waveguide layer in a semiconductor photodetector includes a first interface in contact directly with a first insulation layer and a second interface in contact directly with a second insulation layer, wherein each of the first and second insulation layers is much lower in refractive index than any parts of the optical waveguide layer so that a light being propagated through the optical waveguide layer reflects at the first and second interfaces without any permeation into the first and second insulation layers.
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M. Sugiyama, et al., "A selective epitaxial SiGe/Si planar photodetector for Si-based OEICs", pp. 22.7.1--22.7.4, IEEE, 1995.
Bovernick Rodney
Hao Victoria D.
NEC Corporation
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