Wave transmission lines and networks – Automatically controlled systems – With control of equalizer and/or delay network
Patent
1988-12-21
1990-06-26
Davie, James W.
Wave transmission lines and networks
Automatically controlled systems
With control of equalizer and/or delay network
333 32, 372 36, 372 38, H01L 2348
Patent
active
049376608
ABSTRACT:
A silicon-based laser mounting structure is disclosed which provides improved interconnection between a semiconductor optical device, such as a laser, and an external high frequency modulation current source, by reducing the presence of parasitic inductive elements in the interconnecting network. The structure includes a stripline transmission path formed by depositing metal conductive strips on the top and bottom surfaces of a silicon substrate. The conductive strips are coupled at one end to the external modulation current source. A thin film resistor is deposited between the second end of the top conductive strip and the semiconductor optical device. This thin film resistor is utilized to provide impedance matching between the optical device and the stripline. That is, for a laser with an impedance Z.sub.L, and a stripline designed to have an impedance Z.sub.S, the resistance R is chosen such that R+Z.sub.L =Z.sub.S. Utilizing silicon processing techniques, the thin film resistor may be placed adajcent to the laser, reducing the parasitics associated with their interconnection. A conductive via is formed through the substrate to provide a top-side bonding location for connecting the optical device to the bottom metal conductor, by providing the top-side site, the parasitic inductance associated with this interconnection is considerably reduced.
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Dietrich Norman R.
Moyer Ralph S.
Wong Yiu-Huen
AT&T Bell Laboratories
Davie James W.
Koba Wendy W.
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