Silicon-based dielectric tunneling emitter

Electric lamp or space discharge component or device manufacturi – Process – Electrode making

Reexamination Certificate

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C445S049000, C445S051000, C438S020000, C427S099300, C427S077000, C257S010000, C257S011000, C313S309000, C313S311000, C313S336000, C313S495000, C313S497000

Reexamination Certificate

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06902458

ABSTRACT:
An emitter has an electron supply layer and a silicon-based dielectric layer formed on the electron supply layer. The silicon-based dielectric layer is preferably less than about 500 Angstroms. Optionally, an insulator layer is formed on the electron supply layer and has openings defined within which the silicon-based dielectric layer is formed. A cathode layer is formed on the silicon-based dielectric layer to provide a surface for energy emissions of electrons and/or photons. Preferably, the emitter is subjected to an annealing process thereby increasing the supply of electrons tunneled from the electron supply layer to the cathode layer.

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