Silicon-based composition, low dielectric constant film,...

Details Silicon-based composition, low dielectric constant film,... Silicon-based composition, low dielectric constant film,...

2008-04-15

2008-04-15

Vo, Hai (Department: 1794)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

C525S474000, C525S477000, C528S031000, C528S035000, C556S431000, C438S781000

Reexamination Certificate

active

07358299

ABSTRACT:
A composition comprising a siloxane resin, a silicon compound substantially consisting of silicon, carbon and hydrogen, wherein the number ratio of carbon to silicon atoms forming an —X— bond (wherein X is (C)m(where m is an integer in the range of from 1 to 3), or a substituted or unsubstituted aromatic group with 9 or less carbon atoms) in the main chain of one molecule is in the range of from 2:1 to 12:1, and a solvent, is subjected to a heat treatment to form a low dielectric constant film. Accordingly, a low dielectric constant film having excellent resistance against chemicals and excellent moisture resistance is provided. A semiconductor integrated circuit having a fast response can be produced by using the film.

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