Fishing – trapping – and vermin destroying
Patent
1986-11-17
1988-04-12
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437192, 437193, 437201, 437188, 148DIG1, 148DIG147, 357 71, H01L 2128
Patent
active
047374748
ABSTRACT:
A process for forming a bonding layer comprising amorphous silicon, titanium, chromium, or tungsten, between the silicide and the N+ polysilicon layer is disclosed. The bonding layer is preferably less than 50 nm. thick. After the bonding layer is deposited, a silicide layer is deposited and the wafer is then sintered at 900.degree.-1000.degree. C. for ten minutes or less.
REFERENCES:
patent: 4322453 (1982-03-01), Miller
patent: 4504521 (1985-03-01), Widmer et al.
patent: 4581627 (1986-04-01), Ueda et al.
IBM Tech. Disc. Bull., vol. 28, No. 9, Feb. 1986, pp. 3968-3969.
Chow Yu C.
Mendonca John
Price J. B.
Wu Schyi-Yi
Hearn Brian E.
Quach T. N.
Spectrum CVD, Inc.
Wille Paul F.
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