Silicide to silicon bonding process

Fishing – trapping – and vermin destroying

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437192, 437193, 437201, 437188, 148DIG1, 148DIG147, 357 71, H01L 2128

Patent

active

047374748

ABSTRACT:
A process for forming a bonding layer comprising amorphous silicon, titanium, chromium, or tungsten, between the silicide and the N+ polysilicon layer is disclosed. The bonding layer is preferably less than 50 nm. thick. After the bonding layer is deposited, a silicide layer is deposited and the wafer is then sintered at 900.degree.-1000.degree. C. for ten minutes or less.

REFERENCES:
patent: 4322453 (1982-03-01), Miller
patent: 4504521 (1985-03-01), Widmer et al.
patent: 4581627 (1986-04-01), Ueda et al.
IBM Tech. Disc. Bull., vol. 28, No. 9, Feb. 1986, pp. 3968-3969.

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