Silica glass member with glassy carbon coating method for produc

Glass manufacturing – Processes – Operating under inert or reducing conditions

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65601, 65 603, 65 606, 65 93, 65 95, 428426, 428448, 428698, C03B 3700, C03B 1300, C03C 1700

Patent

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058074163

ABSTRACT:
A silica glass member shows a glassy carbon coating wherein a surface of a silica glass substrate of the silica glass member shows a mean surface roughness (R.sub.a) in a range of 0.03 .mu.m to 2 .mu.m and it is coated with a glassy carbon coating. The member is manufactured by chemically roughening the substrate to a surface roughness in the above recited range; coating the surface of the silica glass substrate with an organic raw material containing carbon, curing and thereafter carbonizing the film of the organic raw material by forming a glassy carbon coating.

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patent: 5681609 (1997-10-01), Kitayama et al.

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