Compositions: ceramic – Ceramic compositions – Glass compositions – compositions containing glass other than...
Reexamination Certificate
2005-07-06
2008-12-09
Green, Anthony J (Department: 1793)
Compositions: ceramic
Ceramic compositions
Glass compositions, compositions containing glass other than...
C501S053000, C250S50400H, C359S350000
Reexamination Certificate
active
07462574
ABSTRACT:
A silica glass containing TiO2, characterized in that the fluctuation of the refractive index (Δn) is at most 2×10−4within an area of 30 mm×30 mm in at least one plane. A silica glass containing TiO2, characterized in that the TiO2concentration is at least 1 mass %, and the striae pitch is at most 10 μm. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO2, and the fluctuation of the refractive index (Δn) is at most 2×10−4in a plane perpendicular to the incident light direction. An optical material for EUV lithography, characterized in that it is made of a silica glass containing TiO2, wherein the TiO2concentration is at least 1 mass %, and the difference between the maximum value and the minimum value of the TiO2concentration is at most 0.06 mass % in a plane perpendicular to the incident light direction.
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D15A. Quotation to Customer 1 dated Feb. 26, 2003 for sale of Corning 7972 ULE EUV Grade glass having a CTE of 0± 5ppb/ °C.
D15B. Closed order for Customer 1 dated Mar. 2003 for a shipped order of Corning [7972] ULE EUV Grade glass having a CTE of 0 ± 5 ppb/ °C.
D16A. Quotation to Customer 2 dated Apr. 1, 2003 for sale of Corning 7972 ULE EUV Grade glass.
D16B. Closed order for Customer 2 dated Apr. 7, 2003 for a shipped order of Corning [7972] ULE EUV Grade glass.
D17. Affidavit of Junichi Yokoyama regarding offers to sell Corning ULE® EUV glass (D15 and D16), Jul. 11, 2008.
D18. Affidavit of Kenneth E. Hrdina regarding the availability to the public of D4A and D5 and regarding Corning ULE® EUV Grade glass, Jul. 16, 2008.
D19. Affidavit of Walter M. Douglas regarding identification of the ULE® EUV glass (D15 and D16), Jul. 16, 2008.
Iwahashi Yasutomi
Koike Akio
Asahi Glass Company Limited
Green Anthony J
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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