Silica-based coating film on substrate and coating solution...

Details Silica-based coating film on substrate and coating solution... Silica-based coating film on substrate and coating solution...

2006-11-14

2006-11-14

Brusman, David M. (Department: 1755)

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

C106S287140, C106S287160

Reexamination Certificate

active

07135064

ABSTRACT:
A silica-based coating film having a low dielectric constant not exceeding 2.5 can be formed on the surface of a substrate to serve as a planarizing layer or an interlayer insulating layer by coating the surface with a unique coating solution containing a hydrolysis-condensation product of a polyalkoxy silane compound such as tetraethoxy silane and monomethyl trimethoxy silane, which is formed by the hydrolysis of a polyalkoxy silane in the presence of a basic catalyst such as ammonia in an alcohol solvent in a relatively low concentration followed by replacement of the alcohol solvent with an aprotic polar solvent such as N-methyl pyrrolidone, followed by drying and baking at 350 to 800° C.

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