Silica and silica-based slurry

Details Silica and silica-based slurry Silica and silica-based slurry

2007-10-09

2007-10-09

Goudreau, George A. (Department: 1763)

Compositions

Etching or brightening compositions

C252S079200, C252S079300, C252S079400

Reexamination Certificate

active

10627776

ABSTRACT:
This invention relates to a silica, a slurry composition, and a method of their preparation. In particular, the silica of the present invention includes aggregated primary particles. The slurry composition which incorporates the silica, is suitable for polishing articles and especially useful for chemical-mechanical planarization of semiconductor substrates and other microelectronic substrates.

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