Gas separation: processes – Solid sorption – Organic gas or liquid particle sorbed
Patent
1992-04-24
1994-03-01
Spitzer, Robert
Gas separation: processes
Solid sorption
Organic gas or liquid particle sorbed
95106, 95148, 95901, B01D 5304
Patent
active
052903427
ABSTRACT:
Improved process for separating ethylsilane from silane by selective adsorption onto an effectively treated carbon bed and method of treatment of such carbon bed to enhance the selective adsorption of ethylsilane.
REFERENCES:
patent: 2882243 (1959-04-01), Milton
patent: 2971607 (1961-02-01), Caswell
patent: 2987139 (1961-06-01), Bush
patent: 3019087 (1962-01-01), Jacob et al.
patent: 3031268 (1962-04-01), Shoemaker
patent: 3041141 (1962-06-01), Shoemaker et al.
patent: 3043664 (1962-07-01), Mason et al.
patent: 3078636 (1963-02-01), Milton
patent: 3078645 (1963-02-01), Milton
patent: 3778387 (1973-12-01), Urbanic et al.
patent: 3968199 (1976-07-01), Bakay
patent: 4099936 (1978-07-01), Tarancon
patent: 4224040 (1980-09-01), Gazzarrini et al.
patent: 4340574 (1982-07-01), Coleman
patent: 4532120 (1985-07-01), Smith et al.
patent: 4537759 (1986-08-01), Walker et al.
patent: 4554141 (1985-11-01), Scull et al.
patent: 4632816 (1986-12-01), Marlett
patent: 4772296 (1988-09-01), Potts
patent: 4933162 (1990-06-01), Vansant et al.
patent: 4976944 (1990-12-01), Pacaud et al.
patent: 5051117 (1991-09-01), Prigge et al.
patent: 5075092 (1991-12-01), Boone et al.
Chemical Abstracts, CA84-172769h, Ultrahigh Purification of Silane for Semiconductor Silicon, Yusa et al., Japan.
Chemical Abstracts, CA79-138335a, Purification of Silane, Muraoka et al., Japan.
Chemical Abstracts, CA80-138464n, Purification of Monosilane Useful as a Raw Material for Semiconductors, Kuratomi et al., Japan.
Chemical Abstracts, CA81-140458c, Purification of Poisonous Gas Produced in the Semiconductor Manufacturing Process, Watanabe, Japan.
Chemical Abstracts, CA82-158318n, Purification of Silane, Asano et al., Japan.
Chemical Abstracts, CA89-131816f, Purification of Silane, Tarancon, USA (Ger. Offen. 2,755,824).
Chemical Abstracts, CA92-167081p, Purification of Silane, Union Carbide Corp. (Neth. Appl. 78 03,471).
Chemical Abstracts, CA94-194253u, Purification of Monosilane, Lebedev et al., USSR.
Chemical Abstracts, CA97-200298t, Purification of Chlorosilanes by Distillation, Carvalho et al., Brazil.
Chemical Abstracts, CA99-55843b, Monosilane Purification, Japan.
Chemical Abstracts, CA84-166812a, Production and Purification of Monosilane, Yushkov et al., USSR.
Yusa et al., "Ultrahigh Purification of Silane for Semiconductor Silicon," J. Electrochem. Soc., vol. 122, No. 12, Dec. 1975, pp. 1700-1705.
Lorenz, "A Survey of the Preparation, Purity, and Availability of Silanes,"-A Subcontract Report for the Department of Energy, Subcontract No. CL-3-00321-01, Dec. 1983.
Lewis et al., "Preparation of High-Purity Silicon from Silane," Journal of the Electrochemical Society, vol. 108, No. 12, Dec. 1961, pp. 1114-1118.
Chemical Abstracts, (49766v), vol. 80, 1974, p. 106.
Chemical Abstracts, (62804n), vol. 83, 1975, p. 270.
Chemical Abstracts, (90:161368z), vol. 90, 1979, p. 607.
Gmelin, Gmelin Handbuch der Anorganischen Chemie, Springer-Verlag, 1982, pp. 76-78 (Translated).
Everly Charles R.
Park Won S.
Wikman Andrew O.
Ethyl Corporation
Spitzer Robert
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