Silane composition, silicon film forming method and solar...

Details Silane composition, silicon film forming method and solar... Silane composition, silicon film forming method and solar...

2007-02-06

2007-02-06

Nguyen, Nam (Department: 1753)

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

C136S258000, C427S075000, C252S182300, C106S287100

Reexamination Certificate

active

11404921

ABSTRACT:
A silane composition for preparing a semiconductor thin films of a solar cell is disclosed. The silane composition contains a polysilane compound represented by the formula SinRm(n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more), and at least one silane compound selected from cyclopentasilane, cyclohexasilane and silylcyclopentasilane.

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