Signal tower controller

Details Signal tower controller Signal tower controller

1997-09-08

1998-09-01

Mullen, Jr., Thomas J.

Communications: electrical

Condition responsive indicating system

Specific condition

3408154, 118715, 118720, G08B 2100

Patent

active

058016341

ABSTRACT:
The invention provides an apparatus and method of monitoring a CVD process and providing an alarm signal normally used to terminate the CVD process in response to detecting the simultaneous occurrences of a command to initiate the CVD process, the initiation of the flow of a reactive process gas into the process chamber and the motion of a turret supporting the workpiece.

REFERENCES:
patent: 4668479 (1987-05-01), Manabe et al.
patent: 5153841 (1992-10-01), Goff et al.
patent: 5446450 (1995-08-01), Knutson
patent: 5690744 (1997-11-01), Landau
patent: 5700127 (1997-12-01), Harada et al.

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