Signal-to-noise ratio of second harmonic interferometers

Details Signal-to-noise ratio of second harmonic interferometers Signal-to-noise ratio of second harmonic interferometers

1996-11-14

1998-05-05

Nelms, David C.

Optics: measuring and testing

By particle light scattering

With photocell detection

356349, 356352, G01B 902

Patent

active

057483132

ABSTRACT:
The signal-to-noise ratio of the correction signal used for second harmonic interferometry is improved in two ways. First, an optical amplifier, tuned to the second harmonic frequency, is positioned in the optical path. Second, a doubling stage is positioned internal to the correction laser.

REFERENCES:
patent: 5404222 (1995-04-01), Lis
Stepper Overlay Performances Measurements Using the Air Turbulence Compensated Interferometer by Philip D. Henshaw, Sparta, Inc., proceedings of the SPIE (The International Society for Optical Engineering Conference), vol. 2726, pp. 809-820, Mar. 13-15, 1996.

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