Sidewalls as semiconductor etch stop and diffusion barrier

Details Sidewalls as semiconductor etch stop and diffusion barrier Sidewalls as semiconductor etch stop and diffusion barrier

2005-02-15

2005-02-15

Thompson, Craig A. (Department: 2813)

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

Pedestal base

C438S100000

Reexamination Certificate

active

06855614

ABSTRACT:
Methods and apparatus of forming a semiconductor device using pedestals and sidewalls. The pedestals and sidewalls may provide an etch stop and/or a diffusion barrier during manufacture of a semiconductor device. Processes of forming diode connected vertical cylindrical field effect devices are disclosed to exemplify the use of the pedestals and/or sidewalls. A system for forming the pedestals and sidewalls is described.

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