Sidewall formation process for a top lead fuse

Details Sidewall formation process for a top lead fuse Sidewall formation process for a top lead fuse

1995-04-24

1996-05-28

Fourson, George

Fishing, trapping, and vermin destroying

437922, 437228, 148DIG55, H01L 2170, H01L 2700

Patent

active

055211160

ABSTRACT:
A method for fabricating and for blowing top lead fuses (41 and 42) includes the steps of: (a) forming a conductive top lead fuse (41) on a layer of insulator (45); (b) depositing a layer of top insulator (47) over the top lead fuse at a top to sidewall thickness ratio of approximately 2:1; (c) anisotropically etching the top insulator back universally to a top to sidewall thickness ratio of approximately 1:2. The resulting top lead fuses (30 and 31) are selectively blown explosively out (24) of the top surface of the top insulator.

REFERENCES:
patent: 3564354 (1971-02-01), Aoki et al.
patent: 3792319 (1974-02-01), Tsang
patent: 4413272 (1983-11-01), Mochizuki et al.
patent: 4455194 (1984-06-01), Yabu
patent: 4774561 (1988-09-01), Takagi
patent: 4853758 (1989-08-01), Fischer

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