Sidewall decoupling capacitor

Details Sidewall decoupling capacitor Sidewall decoupling capacitor

1992-12-03

1994-08-16

Lateef, Marvin M.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361328, 3613063, 361329, 361330, 29 2542, H01G 114

Patent

active

053392124

ABSTRACT:
The invention provides a decoupling capacitor which utilizes a plurality of tungsten studs and metal interconnects to maximize the surface area of the capacitor, thereby increasing the capacitance. The metal interconnects only partially overlap the tungsten studs, forming the first plate of the capacitor, so that the tops of the studs as well as the sides and tops of the interconnects provide the increased surface area. A method of forming the capacitors, and a method of increasing capacitance of a capacitor, are also provided.

REFERENCES:
patent: 3930065 (1975-12-01), Baker et al.
patent: 4274124 (1981-06-01), Feinberg et al.
patent: 4349862 (1982-09-01), Bajorek et al.
patent: 4376329 (1983-03-01), Behn et al.
patent: 4409259 (1983-10-01), Bohr et al.
patent: 4707897 (1987-11-01), Rohrer et al.
patent: 4743464 (1988-05-01), Larguier et al.
patent: 4789645 (1988-12-01), Calviello et al.
patent: 5155573 (1992-10-01), Abe et al.

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