Side spring micro-mirror

Details Side spring micro-mirror Side spring micro-mirror

2006-10-10

2006-10-10

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

07119942

ABSTRACT:
A micro-electrical mechanical system (MEMS) mirror assembly including an array of micro-mirrors formed on a substrate and having springs on one side and which angularly tilt between ON and OFF states in response to an electrostatic force generated by a voltage applied to an electrode located on the substrate. At least one, but preferably two springs in the form of two thin strips of metal attach to post(s) at the side edge of the mirror and act as springs which provide a restoring force when the mirror is tilted between an OFF state which occurs when the mirror is flat relative to the substrate with no voltage applied, and in the ON state when the mirror is tilted when a voltage is applied.

REFERENCES:
patent: 3746911 (1973-07-01), Nathanson et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5748172 (1998-05-01), Song et al.
patent: 5953151 (1999-09-01), Hewlett
patent: 6356378 (2002-03-01), Huibers
patent: 6577431 (2003-06-01), Pan et al.
patent: 6724509 (2004-04-01), Lee

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