SiC thin-film thermistor

Details SiC thin-film thermistor SiC thin-film thermistor

1991-07-23

1993-06-01

Lateef, Marvin M.

Electrical resistors

Resistance value responsive to a condition

Current and/or voltage

338307, 338308, 338312, 338314, 20419221, H01C 710, C23C 1400

Patent

active

052164047

ABSTRACT:
A thin-film thermistor element which has an electrically insulating substrate having first and second surfaces opposite to each other and also having a pair of through-holes defined therein so as to extend completely across the thickness thereof, and a pair of electrode films each including a body portion of large surface area and a generally comb-shaped portion continued outwardly from the body portion. The electrode films are formed by the use of a firing process on the first surface of the substrate with the respective comb-shaped portions thereof confronting with each other. First and second electroconductive films are also formed on respective surrounding wall faces defining the corresponding through-holes in the substrate in electrically connected relationship with the body portions of the associated electrode films. A temperature sensitive resistance film is formed by the use of a high frequency sputtering process on the first surface of the substrate so as to overlay the electrode films. A method of making the thermistor element is also disclosed.

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