Compositions: ceramic – Ceramic compositions – Carbide or oxycarbide containing
Reexamination Certificate
2005-06-17
2008-08-12
Kunemund, Robert M. (Department: 1792)
Compositions: ceramic
Ceramic compositions
Carbide or oxycarbide containing
C501S087000, C257S077000, C117S084000, C117S951000
Reexamination Certificate
active
07410923
ABSTRACT:
A highly corrosion-resistant SiC material is formed on a base body by a CVD process. The SiC material contains β-SiC crystals so oriented that the ratio of the sum of peak intensities of x-ray diffraction for (220) and (311) planes of the β-Sic csystals to the sum of peak intensities of x-ray diffraction for (111), (200), (220), (311) and (222) planes Of the β-SiC crystals is 0.15 or above. The SiC material may contain both β-SiC crystals and α-SiC crystals of 6H structure. A base body with a SiC material by a CVD process is used as an internal component member of a semiconductor device fabricating system.
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Nogami Satoru
Otsuki Hayashi
Kunemund Robert M.
Smith , Gambrell & Russell, LLP
Song Matthew J
Tokyo Electron Limited
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