Chemistry: physical processes – Physical processes – Crystallization
Patent
1976-10-15
1978-05-23
Emery, Stephen J.
Chemistry: physical processes
Physical processes
Crystallization
156608, 156617SP, 156DIG64, 156DIG83, 156DIG88, 432264, 432265, 427 94, B01J 1718, C01B 3302
Patent
active
040908518
ABSTRACT:
Mechanical components, e.g. die and/or crucible or the like structures with which single silicon crystals are grown from the melt as shaped articles in thin sheet or ribbon geometry, are advantageously comprised, for their material of construction, of a suitable thermally stable and inert foundation substrate coated or provided on at least the silicon-contacting surface(s) thereof with a thin, uniform, integral surface layer deposit of pyrolitic silicon nitride (Si.sub.3 N.sub.4) obtained by the chemical vapor deposition (i.e., "CVD") technique.
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Croft Rev. of Ceramic Technology, #26, Feb. 1974, pp. 1-12.
Berkman Samuel
Kim Kyong-Min
Temple Harold Edgar
Christoffersen H.
Emery Stephen J.
Morris B. E.
RCA Corporation
Zavell A. Stephen
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