Si-O containing hydrogenated carbon film, optical device...

Details Si-O containing hydrogenated carbon film, optical device... Si-O containing hydrogenated carbon film, optical device...

2007-10-31

2011-11-01

Dowling, William C (Department: 2878)

Optics: image projectors

Polarizer or interference filter

C359S485030, C359S486010, C359S576000, C353S121000, C427S249700, C427S249150, C427S163100, C427S906000

Reexamination Certificate

active

08047653

ABSTRACT:
An Si—O containing hydrogenated carbon film as an optical film has a refractive index in a range from at least 1.48 to at most 1.85 for light of 520 nm wavelength and an extinction coefficient of less than 0.15 for light of 248 nm wavelength, wherein the refractive index and the extinction coefficient are decreased with energy beam irradiation. By utilizing such an Si—O containing hydrogenated carbon film, it is possible to provide various types of optical elements and an optical device including the same.

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