Shutter structure of an oven apparatus used in semiconductor...

Details Shutter structure of an oven apparatus used in semiconductor... Shutter structure of an oven apparatus used in semiconductor...

2006-01-31

2006-01-31

Wilson, Gregory (Department: 3749)

Heating

Heating or heat retaining work chamber structure

Door, cover or port

C049S333000

Reexamination Certificate

active

06991455

ABSTRACT:
A shutter structure of an oven apparatus used in semiconductor or liquid crystal display (LCD) processes includes a hollow housing and an open device, wherein the housing has a front face, a first face, a second face and a rear face whose edges of two sides are respectively connected with one respective side edge of the first face and the second face, and the front face is opposite to the rear face and is structurally separable at least with the first face and with the second face, and the open device includes a rotating shaft which is disposed at one side of the front face and a driver which is disposed at one end of the rotating shaft and used to drive the front face of the shutter to open rotatedly so as to have a substrate placed into the housing and taken out from the housing.

REFERENCES:
patent: 685886 (1901-11-01), Voegelein
patent: 6091056 (2000-07-01), Kannan et al.
patent: 6113734 (2000-09-01), Woo et al.

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