Shutter apparatus for a coating chamber viewport

Details Shutter apparatus for a coating chamber viewport Shutter apparatus for a coating chamber viewport

1994-02-08

1995-05-09

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

118713, C23C 1452

Patent

active

054136881

ABSTRACT:
A shutter apparatus capable of protecting the interior surface of an evacuable optical coating chamber viewport from the deposition of off-substrate coating material when in the closed position, and exposing the viewport surface to permit viewing through the viewport into the chamber when in the open position. The movement of the shutter between the open and closed positions is accomplished without breaching the chamber seal.

REFERENCES:
patent: 4166018 (1979-08-01), Chapin
patent: 4356073 (1982-10-01), McKelvey
patent: 4422916 (1983-12-01), McKelvey
patent: 4881335 (1989-11-01), Khoshkish
patent: 4911810 (1990-03-01), Lauro et al.

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