Shut-off valve and method of shutting off opening of vacuum...

Valves and valve actuation – With means to increase head and seat contact pressure – With positive reduction

Reexamination Certificate

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Details

C251S183000, C251S188000, C251S309000

Reexamination Certificate

active

11110841

ABSTRACT:
A shut-off valve disposed between openings formed to a vacuum chamber includes a casing, a valve body disposed inside the casing and having a shaft rotating around a central axis of the valve body, a drive unit for driving the valve body to rotate the shaft, and an open/close mechanism provided for the shaft for opening and closing each of the openings. The open/close mechanism includes a sheet member mounted to the shaft so as to protrude outward in a radial direction of the shaft to thereby close each of the openings, an urging member urging the sheet member inward or outward in the radial direction of the shaft, and a seal member connected to the sheet member so as to be associated therewith and forming a sealed space between the sheet member and the shaft, which is formed with an air passage communicating with the sealed space.

REFERENCES:
patent: 2746712 (1956-05-01), Wickman
patent: 2825528 (1958-03-01), Truitt
patent: 4157169 (1979-06-01), Norman
patent: 5137258 (1992-08-01), Takamatsu
patent: 6206029 (2001-03-01), Onodera
patent: 11-351448 (1999-12-01), None

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