Shower head structure and cleaning method thereof

Details Shower head structure and cleaning method thereof Shower head structure and cleaning method thereof

2005-06-14

2005-06-14

Ganey, Steven J. (Department: 3752)

Fluid sprinkling, spraying, and diffusing

Processes

Including heating or cooling

C239S128000, C239S135000, C239S139000, C239S548000, C239S600000, C118S715000, C118S724000, C118S725000

Reexamination Certificate

active

06905079

ABSTRACT:
There is disclosed a shower head structure, disposed on a ceiling portion of a process chamber for subjecting a material to be treated to a film forming process, for supplying a predetermined gas, the structure comprising a head main body formed in a cup shape having a bottom with a plurality of gas injection holes opened therein, and formed integrally with a joining flange portion to be attached to the ceiling portion of the process chamber on an opening side of the cup shape, and a head heating portion, disposed on the bottom of the head main body, for adjusting the head main body at a desired temperature, so that the film forming process for enhancing reproducibility under a low temperature is performed and a reactive byproduct is removed under a high temperature.

REFERENCES:
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patent: 5785796 (1998-07-01), Lee
patent: 5950925 (1999-09-01), Fukunaga et al.
patent: 6036782 (2000-03-01), Tanaka et al.
patent: 6302964 (2001-10-01), Umotoy et al.
patent: 6453992 (2002-09-01), Kim
patent: 2-137318 (1990-05-01), None
patent: 2-268429 (1990-11-01), None
patent: 6-326078 (1994-11-01), None
patent: 375780 (1999-12-01), None

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