Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light
Patent
1996-12-18
2000-03-14
Le, N.
Incremental printing of symbolic information
Light or beam marking apparatus or processes
Scan of light
347256, 347260, 347261, 347239, B41J 2435
Patent
active
060379677
ABSTRACT:
A laser pattern generator for semiconductor mask making or direct writing of features on a semiconductor wafer uses a pulsed laser source to achieve high power and short wavelength (e.g. 263 nm or less) radiation, for writing very small-sized features. The laser pulse frequency is either synchronous or asynchronous to the writing grid of the features being written, in various embodiments.
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Allen Paul C.
Mirro Eugene
Etec Systems, Inc.
Klivans Norman R.
Le N.
Pham Hai C.
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