Short wavelength laser optical apparatus

Details Short wavelength laser optical apparatus Short wavelength laser optical apparatus

1994-07-22

1995-06-13

Lee, John D.

Coherent light generators

Particular resonant cavity

Specified cavity component

372 57, 372 60, 359509, 359809, H01S 3034

Patent

active

054250455

ABSTRACT:
A laser optical apparatus permits the use of a laser beam having a spectrum characteristic which substantially overlaps with an absorption band of oxygen, with a simple construction. Oxygen in a lens barrel of an optical system or a sealed space between lens barrels is absorbed by a deoxidation agent. Accordingly, even if a laser beam by an excimer laser using argon fluoride having a spectrum characteristic which substantially overlaps with the absorption of oxygen is passed through the optical system, the loss of laser energy by the absorption of oxygen, the generation of noxious gas and the swing due to the change of transmission are prevented.

REFERENCES:
patent: 3696230 (1972-10-01), Friedrich
patent: 4316157 (1982-02-01), Dosi et al.
patent: 4888786 (1989-12-01), Davis et al.
patent: 5049762 (1991-09-01), Katoh

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