Short-wavelength coherence tomography

Details Short-wavelength coherence tomography Short-wavelength coherence tomography

2008-02-27

2010-02-02

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07656538

ABSTRACT:
The present relates generally to methods, systems and apparatuses for three dimensional and cross-sectional imaging of objects (e.g., silicon) and subjects at a nanometer-scale resolution using short wave-length (e.g., extreme ultra-violet) light.

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