Short pulsewidth, high pulse repetition frequency laser system

Details Short pulsewidth, high pulse repetition frequency laser system Short pulsewidth, high pulse repetition frequency laser system

1997-05-12

1999-02-09

Healy, Brian

Coherent light generators

Particular pumping means

Pumping with optical or radiant energy

372 21, 372 27, 372 25, 372 69, 372 70, 372 98, 372106, 21912168, 21912169, 2191216, 21912161, H01S 3091, B23K 2600

Patent

active

058704213

ABSTRACT:
A laser system capable of high speed silicon wafer dicing is disclosed. A laser with high average power, high repetition rate, ultra-short pulsewidth, and excellent beam quality is described. This is achieved by the use of high power diodes used to uniformly pump an improved Nd:YAlO.sub.3 crystal, resulting in a beam with excellent quality. In addition, a beta-barium borate (BBO) crystal, used in conjunction with drift step recovery diodes (DSRDs), forms a high speed optical switch which can be used to cavity dump the laser.

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patent: 5648976 (1997-07-01), Franck et al.
patent: 5742634 (1998-04-01), Rieger et al.

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