Shock protectors for micro-mechanical systems

Optical: systems and elements – Mirror – With support

Reexamination Certificate

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Details

C359S877000, C359S221200, C359S222100

Reexamination Certificate

active

06846088

ABSTRACT:
The present invention is directed towards shock protectors for a pedestal suspended over a lower surface by a plurality of gimbal springs. Each gimbal spring is connected to a linkage arm that attaches to an actuator. A stop located below the bottom of the pedestal prevents the gimbal springs and/or other structures from impacting the lower surface. In addition, the stop prevents excessively high strain in the gimbal springs. A shock absorber extending from at least one linkage arm serves a similar purpose when the pedestal is tilted, rather than simply displaced.

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