Shock absorbing fluidic actuator

Details Shock absorbing fluidic actuator Shock absorbing fluidic actuator

2007-01-16

2010-06-15

Tadesse, Yewebdar T (Department: 1792)

Coating apparatus

Projection or spray type

Moving projector

C118S052000, C091S393000, C091S001000, C091S361000

Reexamination Certificate

active

07735447

ABSTRACT:
According to one aspect of the invention, a fluidic actuator and a control system for the fluidic actuator may be provided. A first component of the actuator may have two openings interconnected by a passageway. A second component may be moveably housed within the passageway and divide the passageway into two portions. A fluid delivery system may be connected to the two openings. The fluid delivery system may supply a first pressure of fluid to the first portion of the passageway causing the second component to move within the passageway at a first speed. When the second component is in a selected position within the passageway, the fluid delivery system may reduce the pressure of the fluid, causing a reduction in speed of the second component. The fluidic actuator may be used in a wafer processing system.

REFERENCES:
patent: 4901625 (1990-02-01), Bussan et al.
patent: 5152143 (1992-10-01), Kajita et al.
patent: 5431086 (1995-07-01), Morita et al.
patent: 5491422 (1996-02-01), Bitar et al.
patent: 5938847 (1999-08-01), Akimoto et al.
patent: 6159291 (2000-12-01), Morita et al.
patent: 6257118 (2001-07-01), Wilbur et al.
patent: 7351288 (2008-04-01), Nguyen

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