Brakes – Inertia of damping mass dissipates motion – Resiliently supported damping mass
Reexamination Certificate
2007-04-03
2007-04-03
Schwartz, Christopher P. (Department: 3683)
Brakes
Inertia of damping mass dissipates motion
Resiliently supported damping mass
C074S490090
Reexamination Certificate
active
10653287
ABSTRACT:
A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.
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Kubo Tadayuki
Sasaki Takeshi
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Schwartz Christopher P.
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